Diagnostics of a high-current non-sputtering magnetron discharge in hydrogen

A. V. Kaziev; Казиев А. В.; D. V. Kolodko; Колодко Д. В.; N. S. Sazonov; Сазонов Н. С.; M. M. Kharkov; Харьков М. М.; A. V. Tumarkin; Тумаркин А. В.

doi:10.31857/S0033849424110078

Diagnostics of a high-current non-sputtering magnetron discharge in hydrogen

Авторлар: Kaziev A.V.¹^,2, Kolodko D.V.³, Sazonov N.S.¹, Kharkov M.M.¹, Tumarkin A.V.¹
Мекемелер:
1. National Research Nuclear University MEPhI (Moscow Engineering Physics Institute)
2. Lebedev Physical Institute of RAS
3. aNational Research Nuclear University MEPhI (Moscow Engineering Physics Institute), 31 Kashirskoe sh., Moscow, 115409 Russian Federation bLebedev Physical Institute of RAS, 53 Leninskiy prosp., Moscow, 119991 Russian Federation сKotelnikov Institute of Radioengineering and Electronics of RAS, Fryazino Branch, 1 Vvedenskogo pl., Fryazino, Moscow Region, 141190 Russian Federation
Шығарылым: Том 69, № 11 (2024)
Беттер: 1095-1098
Бөлім: Articles
URL: https://rjonco.com/0033-8494/article/view/684287
DOI: https://doi.org/10.31857/S0033849424110078
EDN: https://elibrary.ru/HOFBOQ
ID: 684287

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Аннотация

The experiments were carried out to characterize plasma of a non-sputtering millisecond discharge in hydrogen at a pressure of ~ 1 Torr, pulse duration and a maximum impulse power near 1 ms and 80 kW, correspondingly. It has been demonstrated that the implementation of impulse non-sputtering modes of a magnetron discharge in light gases enables generation of dense non-constricted plasma with no lines of cathode or anode material present in its optical emission spectra.

Негізгі сөздер

non-sputtering magnetron discharge, arc discharge, hydrogen, optical emission spectroscopy

Толық мәтін

Авторлар туралы

A. Kaziev

National Research Nuclear University MEPhI (Moscow Engineering Physics Institute); Lebedev Physical Institute of RAS

Хат алмасуға жауапты Автор.
Email: kaziev@plasma.mephi.ru
Ресей, 31 Kashirskoe sh., Moscow, 115409; 53 Leninskiy prosp., Moscow, 119991

D. Kolodko

aNational Research Nuclear University MEPhI (Moscow Engineering Physics Institute),
31 Kashirskoe sh., Moscow, 115409 Russian Federation
bLebedev Physical Institute of RAS, 53 Leninskiy prosp., Moscow, 119991 Russian Federation
сKotelnikov Institute of Radioengineering and Electronics of RAS, Fryazino Branch,
1 Vvedenskogo pl., Fryazino, Moscow Region, 141190 Russian Federation

Email: kaziev@plasma.mephi.ru
Ресей, Каширское шоссе, 31, Москва, 115409; Ленинский просп., 53, Москва, 119991; пл. Введенского, 1, Фрязино, Московская обл., 141190

Әдебиет тізімі

Мозгрин Д. В., Ходаченко Г. В., Фетисов И. К.// Физика плазмы. 1995. Т. 21. № 5. P. 422.
Gudmundsson J. T., Brenning N., Lundin D., Helmersson U. // J. Vac. Sci. Technol. A. 2012. V. 30. № 3. P. 030801.
Ходаченко Г. В., Мозгрин Д. В., Фетисов И. К., Степанова Т. В.// Физика плазмы. 2012. Т. 38. № 1. С. 71.
Kaziev A. V. // Vacuum. 2018. V. 158. P. 191.
Sommerer T. J., Aceto S. C., Trotter J. F. et al. // J. Phys. D: Appl. Phys. 2019. V. 52. № 43. P. 435202.
Smith D. J., Sommerer T. J., Lawler J. E., Hitchon W. N. G. // J. Phys. D: Appl. Phys. 2021. V. 54. № 29. P. 295201.
Levko D., Raja L. L. // J. Appl. Phys. 2022. V. 132. № 24. P. 243301.

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Жүктеу

2. Fig. 1. Oscillogram of discharge development, with the transition from HPMC to arc discharge: 1 – discharge voltage, 2 – discharge current, 3 – current supplied to the probe (×10³).