Effect of deformation nanostructuring on ion-beam erosion of metals

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The effect of deformation nanostructuring of copper, nickel, and titanium on ion-induced morphology and sputtering under 30 keV argon ions high-fluence irradiation along the normal to the surface has been studied. Sputtering of a layer commensurate with the size of metal grains leads to a uniform cone-shaped relief, the stationary erosion of which occurs with significant redepositing of atoms.

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作者简介

N. Andrianova

Moscow State University; Moscow Aviation Institute (National Research University)

Email: anatoly_borisov@mail.ru

Skobeltsyn Institute on Nuclear Physics, Moscow State University

俄罗斯联邦, Moscow, 119991; Moscow, 125993

A. Borisov

Moscow State University; Moscow Aviation Institute (National Research University), Russia
3”STANKIN” Moscow State University of Technology

编辑信件的主要联系方式.
Email: anatoly_borisov@mail.ru

Skobeltsyn Institute on Nuclear Physics, Moscow State University

俄罗斯联邦, Moscow, 119991; Moscow, 125993; Moscow, 127055

M. Ovchinnikov

Moscow State University

Email: anatoly_borisov@mail.ru

Skobeltsyn Institute on Nuclear Physics

俄罗斯联邦, Moscow, 119991

R. Khisamov

Institute for Metals Superplasticity Problems of the Russian Academy of Sciences

Email: anatoly_borisov@mail.ru
俄罗斯联邦, Ufa, 450001

R. Mulyukov

Institute for Metals Superplasticity Problems of the Russian Academy of Sciences

Email: anatoly_borisov@mail.ru
俄罗斯联邦, Ufa, 450001

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2. Fig. 1. SEM images of the surface of copper samples with different structures after irradiation with Ar+ ions with an energy of 30 keV: (a) ultrafine-grained, irradiated with a fluence of 3 1018 ion/cm2, (b) fine-grained – with a fluence of 3 1018 ion/cm2, (c) fine-grained – with a fluence of 1.2 1019 ion/cm2.

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3. Fig. 2. SEM images of the surface of titanium samples after irradiation with Ar+ ions with an energy of 30 keV: (a) ultrafine-grained, irradiated with a fluence of 3 1018 ion/cm2, (b) coarse-grained – with a fluence of 1.2 1019 ion/cm2.

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4. Fig. 3. Dependence of the sputtered layer thickness Δx on the irradiation fluence of Ar+ ions with an energy of 30 keV for metals with different structures.

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5. Fig. 4. Distribution of the inclination angles θ of the cones for ultrafine-grained and fine-grained copper samples irradiated at different fluences (a), dependence of the sputtering coefficient on the inclination angle θ for the case of a single cone Y and a cone-shaped relief Yk on the copper surface when irradiated with Ar+ ions with an energy of 30 keV (b).

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