FEATURES OF VISUALIZATION OF THE THREE-DIMENSIONAL STRUCTURE OF MESOPOROUS PZT FILMS BY FIB-SEM NANOTOMOGRAPHY
- Authors: Atanova A.V.1, Khmelenin D.N.1, Zhigalina O.M.1,2
-
Affiliations:
- Shubnikov Institute of Crystallography, Federal Scientific Research Centre “Crystallography and Photonics,”Russian Academy of Sciences, Moscow, 119333 Russia
- Bauman Moscow State Technical University, Moscow, 107005 Russia
- Issue: Vol 68, No 1 (2023)
- Pages: 105-114
- Section: ПОВЕРХНОСТЬ, ТОНКИЕ ПЛЕНКИ
- URL: https://rjonco.com/0023-4761/article/view/673563
- DOI: https://doi.org/10.31857/S0023476123010046
- EDN: https://elibrary.ru/DMYHLV
- ID: 673563
Cite item