FEATURES OF VISUALIZATION OF THE THREE-DIMENSIONAL STRUCTURE OF MESOPOROUS PZT FILMS BY FIB-SEM NANOTOMOGRAPHY

A. V. Atanova; Атанова А. В.; D. N. Khmelenin; Хмеленин Д. Н.; O. M. Zhigalina; Жигалина О. М.

doi:10.31857/S0023476123010046

FEATURES OF VISUALIZATION OF THE THREE-DIMENSIONAL STRUCTURE OF MESOPOROUS PZT FILMS BY FIB-SEM NANOTOMOGRAPHY

Authors: Atanova A.V.¹, Khmelenin D.N.¹, Zhigalina O.M.¹^,2
Affiliations:
1. Shubnikov Institute of Crystallography, Federal Scientific Research Centre “Crystallography and Photonics,”Russian Academy of Sciences, Moscow, 119333 Russia
2. Bauman Moscow State Technical University, Moscow, 107005 Russia
Issue: Vol 68, No 1 (2023)
Pages: 105-114
Section: ПОВЕРХНОСТЬ, ТОНКИЕ ПЛЕНКИ
URL: https://rjonco.com/0023-4761/article/view/673563
DOI: https://doi.org/10.31857/S0023476123010046
EDN: https://elibrary.ru/DMYHLV
ID: 673563

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Abstract

A technique for studying the three-dimensional structure of porous lead zirconate titanate films by FIB-SEM-nanotomography is presented. Such quantitative characteristics as total porosity, specific surface area, and actual pore size (calculated using the local thickness method) have been obtained. According to the FIB-SEM-nanotomography data, the pore size is 77 ± 33 nm for the film with the PVP porogen and only 27 ± 6 nm for the film with the Brij76 porogen; the latter value is close to the limiting resolution for this method. The final 3D model is shown to be strongly influenced by the chosen ion-beam parameters during milling, which can be varied to obtain a structure without distortion or visualize the accumulation of pores at grain boundaries.

Keywords

THREE-DIMENSIONAL STRUCTURE, MESOPOROUS PZT FILMS, FIB-SEM NANOTOMOGRAPHY

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