Preparing Thin Gallium Sulphide Films via PECVD and Studying Their Properties

L. A. Mochalov; Мочалов Л. А.; M. A. Kudryashov; Кудряшов М. А.; A. A. Logunov; Логунов А. А.; M. A. Vshivtsev; Вшивцев М. А.; I. O. Prokhorov; Прохоров И. О.; V. M. Vorotyntsev; Воротынцев В. М.; V. M. Malyshev; Малышев В. М.; T. S. Sazanova; Сазанова Т. С.; Yu. P. Kudryashova; Кудряшова Ю. П.; E. N. Bulanov; Буланов Е. Н.; A. V. Knyazev; Князев А. В.

doi:10.31857/S0044453723010211

Preparing Thin Gallium Sulphide Films via PECVD and Studying Their Properties

Authors: Mochalov L.A.¹, Kudryashov M.A.², Logunov A.A.¹^,2, Vshivtsev M.A.², Prokhorov I.O.², Vorotyntsev V.M.², Malyshev V.M.², Sazanova T.S.²^,3, Kudryashova Y.P.¹, Bulanov E.N.¹, Knyazev A.V.¹
Affiliations:
1. Lobachevsky University
2. Nizhny Novgorod State Technical University
3. Mendeleev University of Chemical Technology
Issue: Vol 97, No 1 (2023)
Pages: 148-154
Section: ФИЗИЧЕСКАЯ ХИМИЯ ДИСПЕРСНЫХ СИСТЕМ И ПОВЕРХНОСТНЫХ ЯВЛЕНИЙ
Submitted: 27.02.2025
Published: 01.01.2023
URL: https://rjonco.com/0044-4537/article/view/668882
DOI: https://doi.org/10.31857/S0044453723010211
EDN: https://elibrary.ru/BCQPAV
ID: 668882

Cite item

Full Text

Open Access
Restricted Access

Access granted
Restricted Access

Subscription Access

Abstract
About the authors
References
Supplementary files
Statistics

Abstract

Thin films of GaSх are obtained via plasma-enhanced chemical vapor deposition (PECVD) for the first time, while high-purity volatile derivatives of the corresponding macrocomponents (gallium chloride (GaCl3) and hydrogen sulfide (H2S)) are used as the initial materials. It is found that the nonequilibrium low-temperature plasma of an HF discharge (40.68 MHz) at a reduced pressure (0.01 Torr) is the initiator of chemical transformations. Components of reactive plasma formed in the gas phase are studied via optical emission spectroscopy (OES). Structural and electrophysical properties of the obtained materials are studied as well.

Keywords

gallium sulfide, thin films, PECVD

References

Basinski Z.S., Dove D.B., Mooser E. // Helv. Phys. Acta. 1961. V. 34. P. 373.
Zappia M.I., Bianca G., Bellani S. et al. // J. Phys. Chem. C. 2021. V. 125. № 22. P. 11857. https://doi.org/10.1021/acs.jpcc.1c03597
Jones A.C., O’Brien P. // CVD of Compound Semiconductors: Precursor Synthesis, Development and Applications. 1997. Ch. 1. Basic Concepts. P. 1. https://doi.org/10.1002/9783527614639.ch1
Attolini G., Negri M., Besagni T. et al. // Mater. Sci. Eng. B. 2020. V. 261. P. 114623. https://doi.org/10.1016/j.mseb.2020.114623
Goodyear J., Steigmann G.A. // Acta Cryst. 1963. V. 16. P. 946. https://doi.org/10.1107/S0365110X63002565
Harvey A., Backes C., Gholamvand Z. et al. // Chem. Mater. 2015. V. 27. № 9. P. 3483. https://doi.org/10.1021/acs.chemmater.5b00910
Hu P., Wang L., Yoon M. et al. // Nano Lett. 2013. V. 13. № 4. P. 1649. https://doi.org/10.1021/nl400107k
Huang W., Gan L., Li H. et al. // CrystEngComm. 2016. V. 18. P. 3968. https://doi.org/10.1039/C5CE01986A
Moez A.A. // J. Mater Sci: Mater Electron. 2021. V. 32. P. 5668. https://doi.org/10.1007/s10854-021-05288-9
Chen X., Hou X., Cao X. et al. // J. Cryst. Growth. 1997. V. 173. № 1–2. P. 51. https://doi.org/10.1016/S0022-0248(96)00808-1
Eriguchi K., Biaou C., Das S. et al. // AIP Advances. 2020. V. 10. № 10. P. 105215. https://doi.org/10.1063/5.0021938
Lu Y., Chen J., Chen T. et al. // Adv. Mater. 2020. V. 32. № 7. P. 1906958. https://doi.org/10.1002/adma.201906958
Meng X., Libera J.A., Fister T.T. et al. // Chem. Mater. 2014. V. 26. № 2. P. 1029. https://doi.org/10.1021/cm4031057
Rao P., Kumar S., Sahoo N.K. // Mater. Chem. Phys. 2015. V. 149–150. P. 164. https://doi.org/10.1016/j.matchemphys.2014.10.002
Ertap H., Baydar T., Yüksek M., Karabulut M. // Turk. J. Phys. 2016. V. 40. № 3. P. 297. https://doi.org/10.3906/fiz-1604-14
Micocci G., Rella R., Tepore A. // Thin Solid Films. 1989. V. 172. № 2. P. 179. https://doi.org/10.1016/0040-6090(89)90647-0
Kuhs J., Hens Z., Detavernier C. // J. Vac. Sci. Technol. A. 2019. V. 37. № 2. P. 020915. https://doi.org/10.1116/1.5079553
Sanz C., Guillén C., Gutiérrez M.T. // J. Phys. D: Appl. Phys. 2009. V. 42. № 8. P. 085108. https://doi.org/10.1088/0022-3727/42/8/085108
Семенов В.Н., Лукин А.Н., Волков В.В., Остапенко О.В. // Весник ТГУ. 1999. Т. 4. Вып. 2. С. 234.
Zheng N., Bu X., Feng P. // J. Am. Chem. Soc. 2003. V. 125. № 5. P. 1138. https://doi.org/10.1021/ja021274k
Suh S., Hoffman D.M. // Chem. Mater. 2000. V. 12. № 9. P. 2794. https://doi.org/10.1021/cm0003424
Horley G.A., Lazell M.R., O’Brien P. // Chem. Vap. Depos. 1999. V. 5. № 5. P. 203. https://doi.org/10.1002/(SICI)1521-3862(199910)5: 5%3C203::AID-CVDE203%3E3.0.CO;2-L
Meng X., Libera J.A., Fister T.T. et al. // Chem. Mater. 2014. V. 26. № 2. P. 1029. https://doi.org/10.1021/cm4031057
Mochalov L., Logunov A., Kitnis A., Vorotyntsev V. // Plasma Chem. Plasma Process. 2020. V. 40. № 1. P. 407. https://doi.org/10.1007/s11090-019-10035-4
Vorotyntsev V.M., Malyshev V.M., Mochalov L.A. et al. // Sep. Purif. Technol. 2018. V. 199. P. 214. https://doi.org/10.1016/j.seppur.2018.01.065
Mochalov L.A., Kornev R.A., Churbanov M.F., Sennikov P.G. // J. Fluor. Chem. 2016. V. 160. P. 48. https://doi.org/10.1016/j.jfluchem.2014.01.011
Mochalov L.A., Kudryashov M.A., Logunov A.A. et al. // Plasma Chem. Plasma Process. 2021. V. 41. № 6. P. 1661. https://doi.org/10.1007/s11090-021-10190-7
Mochalov L.A., Churbanov M.F., Velmuzhov A.P. et al. // Opt. Mater. 2015. V. 46. P. 310. https://doi.org/10.1016/j.optmat.2015.04.037
Mochalov L., Logunov A., Gogova D. et al. // Opt. Quantum Electron. 2020. V. 52. P. 510. https://doi.org/10.1007/s11082-020-02625-w
Mochalov L., Logunov A., Kudryashov M. et al. // Opt. Mater. Express. 2022. V. 12. № 4. P. 1741. https://doi.org/10.1364/OME.455345
Vesel A., Kovac J., Primc G. et al. // Materials. 2016. V. 9. № 2. P. 95. https://doi.org/10.3390/ma9020095
Zhang Q.‑Z., Wang W., Thille C., Bogaerts A. // Plasma Chem. Plasma Process. 2020. V. 40. № 5. P. 1163. https://doi.org/10.1007/s11090-020-10100-3
Shirai T., Reader J., Kramida A.E., Sugar J. // J. Phys. Chem. Ref. Data. 2007. V. 36. № 2. https://doi.org/10.1063/1.2207144
Thomas R.E., Burton R.L., Glumac N.G., Polzin K.A. // 30th International Electric Propulsion Conference. September 17–20, 2007. Florence, Italy.
Шахатов В.А., Лебедев Ю.А., Lacoste A., Bechu S. // ТВТ. 2016. Т. 54. Вып. 4. С. 491 https://doi.org/10.7868/S0040364416040219