Формирование алмазоподобных углеродных пленок методом плазмохимического разложения углеводородов

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Abstract

Изучен процесс формирования алмазоподобных углеродных пленок на поверхности монокристаллического кремния. Пленка формируется в результате плазмохимического разложения углеводородов (пропан, бутан) и последующего отжига в вакууме. Углеродная пленка формируется в виде алмазоподобных наночастиц диаметром около 8 нм. На границе кремниевой подложки и углеродной пленки формируются связи кремний-углерод, что обеспечивает высокую адгезию.

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А. В. Поволоцкий

Санкт-Петербургский государственный университет

Author for correspondence.
Email: alexey.povolotskiy@spbu.ru
Russian Federation, Санкт-Петербург

Е. В. Смирнов

Санкт-Петербургский государственный университет

Email: alexey.povolotskiy@spbu.ru
Russian Federation, Санкт-Петербург

Ю. С. Тверьянович

Санкт-Петербургский государственный университет

Email: alexey.povolotskiy@spbu.ru
Russian Federation, Санкт-Петербург

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Supplementary files

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2. Fig. 1. Optical scheme of formation of carbon-containing film on the substrate surface by plasma chemical decomposition of hydrocarbons

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3. Fig. 2. Fluorescence spectrum of carbon containing film obtained by plasma chemical decomposition of gaseous hydrocarbons

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4. Fig. 3. XRD spectrum of a diamond-like coating on a silicon substrate. In the inset is an enlarged image of the spectrum in the range of 1000-2000 cm-1

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5. Fig. 4. STM-image of the surface of diamond-like coating on silicon substrate

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6. Fig. 5. RFES spectrum of single crystal silicon with diamond-like coating for the Si2p region

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