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Controlled Nanostructuring of Thin Films by Oblique Deposition
Trushin O.S., Fattakhov I.S., Chebokhin M.M., Popov A.A., Mazaletsky L.A.
Formation of Nanostructures on the Surface of Aluminium—Silicon Films by Bombardment with Low-Energy Argon Ions of Inductive RF Discharge Plasma
Bachurin V.I., Amirov I.I., Lobzov K.N., Simakin S.G., Smirnova M.A.
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