A comprehensive study of nonuniformity properties of the LiCoO2 thin-film cathode fabricated by RF sputtering

Мұқаба

Дәйексөз келтіру

Толық мәтін

Ашық рұқсат Ашық рұқсат
Рұқсат жабық Рұқсат берілді
Рұқсат жабық Тек жазылушылар үшін

Аннотация

The influence of nonuniformity properties of the LiCoO2 cathode film deposited by magnetron sputtering on the capacity of all-solid-state thin-film lithium-ion batteries (ASSLib) was studied. It was found that the film nonuniformity corresponds to the magnetron plasma density distribution and the angular distribution of sputtered particles. The capacity distribution of the ASSLib with LiCoO2 cathode depending on the distance to the substrate center was studied. The maximum capacity corresponded to the dense part of the toroidal region of the magnetron plasma. It was determined that the main causes of batteries capacity decline in the central part and on the edge of the substrate are the impurity phase of lithium cobaltate and the smaller thickness of the cathode layer, respectively.

Авторлар туралы

S. Kurbatov

Valiev Institute of Physics and Technology of RAS, Yaroslavl Branch

Хат алмасуға жауапты Автор.
Email: kurbatov-93@bk.ru
Ресей, Yaroslavl

A. Rudy

Valiev Institute of Physics and Technology of RAS, Yaroslavl Branch

Email: rudy@uniyar.ac.ru
Ресей, Yaroslavl

V. Naumov

Valiev Institute of Physics and Technology of RAS, Yaroslavl Branch

Email: kurbatov-93@bk.ru
Ресей, Yaroslavl

A. Mironenko

Valiev Institute of Physics and Technology of RAS, Yaroslavl Branch

Email: kurbatov-93@bk.ru
Ресей, Yaroslavl

O. Savenko

P.G. Demidov Yaroslavl State University

Email: kurbatov-93@bk.ru
Ресей, Yaroslavl

M. Smirnova

Valiev Institute of Physics and Technology of RAS, Yaroslavl Branch

Email: kurbatov-93@bk.ru
Ресей, Yaroslavl

L. Mazaletsky

Patrice Lumumba Peoples’ Friendship University of Russia

Email: kurbatov-93@bk.ru
Ресей, Moscow

D. Pukhov

Valiev Institute of Physics and Technology of RAS, Yaroslavl Branch

Email: kurbatov-93@bk.ru
Ресей, Yaroslavl

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