Electrical conductivity of a thin polycrystalline film considering various specularity coefficients

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Abstract

An expression for the electrical conductivity of a thin polycrystalline film is obtained. To solve the problem, a kinetic equation is used to approximate the relaxation time, considering electron scattering at the boundaries of polycrystalline film crystallites. The effect of surface scattering of charge carriers is described by diffuse-specular Fuchs boundary conditions. The limiting cases of a degenerate and non-degenerate electron gas are considered. The dependence of the electrical conductivity on the scattering intensity at the crystallite boundary and on the electromagnetic wavelength inside the film is analyzed. The obtained results are compared with the known experimental data for the silicon layer.

About the authors

I. A. Kuznetsova

P.G. Demidov Yaroslavl State University

Author for correspondence.
Email: romanov.yar357@mail.ru
Yaroslavl, Russia

D. N. Romanov

P.G. Demidov Yaroslavl State University

Email: romanov.yar357@mail.ru
Yaroslavl, Russia

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